Ion Milling, RIBE, CAIBE
- ICP source - 14 or 20 cm beam
- Current density up to 4 mA/cm2
- Energy range 100 to 1000 eV
Automatic pumping unit
- Dry pump or vane pump
- Turbomolecular pump with ceramic or magnetic bearings
- Cryogenic pump
Sample holder
- Tiltable substrate holder with planetary rotation and water cooling
Manual or automatic loadlock
End point detector
- Laser interferometer
- SIMS
A few applications
- M RAM
- Transition metal treatment
- Microneedles
