• 
• 
• 
• 
• 
• 
• 
• 
• 
• 

Ion Milling, RIBE, CAIBE

• ICP source - 14 or 20 cm beam
• Current density up to 4 mA/cm2
• Energy range 100 to 1000 eV



• Automatic pumping unit

• Dry pump or vane pump
• Turbomolecular pump with ceramic or magnetic bearings
• Cryogenic pump



• Sample holder

• Tiltable substrate holder with planetary rotation and water cooling



• Manual or automatic loadlock

• End point detector

• Laser interferometer
• SIMS



• A few applications

• M RAM
• Transition metal treatment
• Microneedles