Originality Presentation Location Contact Sites Clients
Evaporation Sputtering systems P.E.C.V.D. Plasma Etching Ashing
Ion Milling Custom Systems Diamond coating Control systems production Machines
Ashing

 Microwave systems, downstream, for stripping of organic materials (photoresist, polyimides…)
 Tubular reactor with external RF electrodes
 RF systems for surface treatment. Examples: MDS 150, MDS 130


References:
  - CEA
  - Alcatel
  - Sagem
  - Thalès
  - Phillips
MDS 150
MDS 130