Originality Presentation Location Contact Sites Clients
Evaporation Sputtering systems P.E.C.V.D. Plasma Etching Ashing
Ion Milling Custom Systems Diamond coating Control systems production Machines
Ion Milling

 ICP source 13.56MHz
 Linear beams or circular beams up to a diameter of 12''
 Filamentless source
 IBE, RIBE, CAIBE

Automatic pumping unit
  - Dry pump or vane pump
  - Turbomolecular pump with ceramic or magnetic bearings
  - Cryogenic pump

Sample holder
  - Tiltable substrate holder with planetary rotation and water cooling

End point detector
  - Laser interferometer
  - SIMS
MU400 Ion Milling, RIBE, CAIBE